The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2025
Filed:
Apr. 28, 2021
Arizona Board of Regents on Behalf of the University of Arizona, Tucson, AZ (US);
Rongguang Liang, Tucson, AZ (US);
Arizona Board of Regents on Behalf of the University of Arizona, Tucson, AZ (US);
Abstract
Systems, devices and methods for measuring surface roughness and surface shape of an optical element using a dual-mode interferometer are disclosed. The devices implement optical filters, with a compact form, that allows measurement of both surface characteristics without rearranging the system components. One example interferometric system includes a laser light source and a low coherence light source that alternatively provide light to a collimator, followed by a polarizer, and a polarizing beam splitter. The system further includes two optical filters, a quarter waveplate, two objectives and a reference optical component. Each light source produces a set of interferograms, where one set of interferograms is used to measure the surface shape and another set of interferograms is used to measure the surface roughness of the optical component.