The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2025
Filed:
Feb. 06, 2020
Applicant:
Mitsubishi Electric Corporation, Tokyo, JP;
Inventor:
Tsutomu Yamaguchi, Tokyo, JP;
Assignee:
Mitsubishi Electric Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 5/227 (2006.01); H01L 21/28 (2006.01); H01S 5/042 (2006.01); H01S 5/343 (2006.01);
U.S. Cl.
CPC ...
H01S 5/2275 (2013.01); H01L 21/28017 (2013.01); H01S 5/0421 (2013.01); H01S 5/343 (2013.01);
Abstract
An insulating film () having an opening () is formed on a contact layer (). A shape stabilization layer () having an inclined surface () is formed on the contact layer () in a peripheral portion of the opening (). An underlying metal () covers an upper surface of the contact layer () exposed through the opening () and the inclined surface (). A plating () is formed on the underlying metal ().