The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2025
Filed:
Nov. 19, 2020
Applicant:
Commissariat À L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Inventors:
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/18 (2006.01); G01J 5/02 (2022.01); G01J 5/04 (2006.01); H01L 21/467 (2006.01); H01L 21/56 (2006.01); H01L 27/146 (2006.01);
U.S. Cl.
CPC ...
H01L 31/1892 (2013.01); G01J 5/024 (2013.01); G01J 5/045 (2013.01); H01L 21/467 (2013.01); H01L 21/568 (2013.01); H01L 27/14649 (2013.01); H01L 27/14683 (2013.01); H01L 31/1868 (2013.01);
Abstract
A process for fabricating a detecting device includes producing a getter pad based on amorphous carbon resting on a mineral sacrificial layer that covers a thermal detector and producing a thin encapsulating layer that rests on the mineral sacrificial layer and that covers an upper face and sidewalls of the getter pad. The mineral sacrificial layer is removed via a first chemical etch, and a protective segment of the getter pad is removed via a second chemical etch.