The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 14, 2025

Filed:

Apr. 06, 2022
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Seunghui Hong, Hwaseong-si, KR;

Sangwon Kim, Suwon-si, KR;

Jeeyong Kim, Hanam-si, KR;

Subin Shin, Suwon-si, KR;

Habin Lim, Suwon-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10B 43/27 (2023.01); H01L 23/535 (2006.01); H10B 41/27 (2023.01); H10B 41/41 (2023.01); H10B 43/40 (2023.01);
U.S. Cl.
CPC ...
H01L 23/535 (2013.01); H10B 41/27 (2023.02); H10B 41/41 (2023.02); H10B 43/27 (2023.02); H10B 43/40 (2023.02);
Abstract

A peripheral circuit structure may include peripheral circuits and peripheral circuit lines on a semiconductor substrate, a semiconductor layer including cell array and connection regions on the peripheral circuit structure, a stack including electrodes stacked on the semiconductor layer having a stepwise structure on the connection region, and a planarization insulating layer covering the stack, vertical structures on the cell array region penetrating the stack, including a data storage pattern, a dam group including insulating dams on the connection region penetrating the stack, penetration plugs penetrating the insulating dams and connected to respective peripheral circuit lines, the dam group including a first insulating dam farthest from the cell array region, the first insulating dam including first and second sidewall portions spaced apart, a difference between upper and lower thicknesses of the second sidewall portion of the first insulating dam is larger than that of the first sidewall portion.


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