The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2025
Filed:
Sep. 13, 2022
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventors:
Assignee:
SEMES CO., LTD., Cheonan-si, KR;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B08B 3/02 (2006.01); B08B 3/08 (2006.01); B32B 41/00 (2006.01); B32B 43/00 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67132 (2013.01); B08B 3/024 (2013.01); B08B 3/08 (2013.01); B32B 41/00 (2013.01); B32B 43/006 (2013.01); H01L 21/67051 (2013.01); H01L 21/6708 (2013.01); H01L 21/6836 (2013.01); B32B 2457/14 (2013.01); H01L 2221/68381 (2013.01); Y10S 134/902 (2013.01);
Abstract
Embodiments of the inventive concept described herein relate to an apparatus and method for removing an adhesive exposed to the outside from an object being processed. The apparatus for removing the adhesive exposed to the outside from an edge region of the object being processed, in which the object has a patterned substrate and a support plate bonded together by the adhesive. The cover liquid nozzle dispenses the cover liquid onto a cover area of a top surface of the object other than the exposed area, and the controller controls the cover liquid dispensing member to adjust a flow rate of the cover liquid to cause a removal rate of the adhesive to remain constant.