The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2025
Filed:
Jul. 06, 2021
Jsw Afty Corporation, Tokyo, JP;
Hironori Torii, Tokyo, JP;
JSW AFTY CORPORATION, Tokyo, JP;
Abstract
A film forming apparatusincludes a target TA, a ring-shaped shield memberprovided between the target TA and a plasma generation unit, and a ring-shaped shield memberprovided between the target TA and a workpiece holding unit. The target TA includes a cylindrical target memberand a backing tube (supporting member)configured to support the target member. Each of the shield member, the shield member, and the target memberis stacked in a Z direction around an axis VLas a central axis extending in the Z direction, each of the shield member, the target member, and the shield memberis arranged so as to be separated from each other in the Z direction, and an inner diameter Dof the shield memberis smaller than an inner diameter Dof the target member
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile