The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2025
Filed:
Dec. 14, 2020
Singulus Technologies Ag, Kahl am Main, DE;
Frank Hofmann, Wörth am Main, DE;
Karl Schmitt, Sailauf, DE;
Stefan Kempf, Alzenau, DE;
Andreas Amrhein, Mespelbrunn, DE;
Bernhard Cord, Alzenau, DE;
Uwe Horlitz, Biebergemünd, DE;
SINGULUS TECHNOLOGIES AG, Kahl am Main, DE;
Abstract
A treatment machine comprises a chamber for the treatment of one substrate or a plurality of substrates. A rotatably supported temperature-controlled shaft () defines a cylindrical, gas-tight hollow space. A heating arrangement () is provided for electrically heating at least a part of the shaft () arranged in the chamber. The heating arrangement () comprises an accommodation mandrel () for accommodating at least one electrical heating element (), said accommodation mandrel () being arranged in a non-rotating manner and extending into the hollow space of the shaft (). An outer surface of the accommodation mandrel () is spaced apart from an inner surface of the shaft () by a gap.