The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2025
Filed:
Sep. 26, 2023
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
John Tolle, Gilbert, AZ (US);
Joseph P. Margetis, Gilbert, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 31/16 (2006.01); C30B 25/08 (2006.01); C30B 25/14 (2006.01); C30B 25/16 (2006.01); C30B 25/18 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C30B 25/14 (2013.01); C30B 25/08 (2013.01); C30B 25/16 (2013.01); C30B 25/18 (2013.01); H01L 21/67011 (2013.01);
Abstract
Gas-phase reactor systems and methods suitable for use with precursors that are solid phase at room temperature and pressure are disclosed. The systems and methods as described herein can be used to, for example, form amorphous, polycrystalline, or epitaxial layers (e.g., one or more doped semiconductor layers) on a surface of a substrate.