The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2025
Filed:
Sep. 15, 2021
Kokusai Electric Corporation, Tokyo, JP;
Motonari Takebayashi, Toyama, JP;
Hiroshi Nakajo, Toyama, JP;
Kokusai Electric Corporation, Tokyo, JP;
Abstract
There is provided a technique that includes: a reaction container configured to accommodate a substrate; an exhaust pipe configured to exhaust an atmosphere inside the reaction container; a gas supplier configured to supply a process gas to the substrate; a gas supply system including at least one gas supply pipe kept in fluid communication with the gas supplier and configured to supply the process gas, a plurality of valves provided on the at least one gas supply pipe, and a plurality of pressure detectors provided between the plurality of valves; and a controller configured to be capable of determining a blockage level of the at least one gas supply pipe based on at least one pressure among measurement results of the plurality of pressure detectors.