The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 14, 2025

Filed:

Feb. 02, 2021
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Bhaskar Prasad, Jamshedpur, IN;

Kirankumar Neelasandra Savandaiah, Bangalore, IN;

Thomas Brezoczky, Los Gatos, CA (US);

Srinivasa Rao Yedla, Bangalore, IN;

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B66F 3/36 (2006.01); B66F 3/24 (2006.01); B66F 13/00 (2006.01); H01J 37/02 (2006.01);
U.S. Cl.
CPC ...
B66F 3/36 (2013.01); B66F 3/247 (2013.01); B66F 13/00 (2013.01); H01J 37/023 (2013.01);
Abstract

A method and apparatus for lifting a process station from a processing module is described herein. The apparatus includes a lift assembly disposed on the processing module, a lift cage, and one or more guide pins. The lift assembly is disposed to be capable of reaching each of the process stations disposed within the processing module. The lift assembly is used for replacement and maintenance of the process stations and further enables the automated removal and placement of the process stations within the processing module. Maintenance methods enabled by the lift assembly are additionally disclosed herein.


Find Patent Forward Citations

Prasad, Bhaskar. (2025). Cathode exchange mechanism to improve preventative maintenance time for cluster system (U.S. Patent No. 12195314). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12195314

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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