The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2025
Filed:
May. 05, 2022
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Yongmyung Jun, Hwaseong-si, KR;
Hyunjin Ko, Hwaseong-si, KR;
Seohyun Kim, Hwaseong-si, KR;
Jae Seong Ryu, Hwaseong-si, KR;
Inkwang Bae, Hwaseong-si, KR;
Seungbu Baek, Hwaseong-si, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68742 (2013.01); H01L 21/67051 (2013.01); H01L 21/67242 (2013.01); H01L 21/68785 (2013.01); H01L 21/67017 (2013.01); H01L 21/67103 (2013.01); H01L 21/6719 (2013.01); H01L 21/67253 (2013.01);
Abstract
A substrate processing chamber includes a housing providing a process space; a spin apparatus provided in the housing; and a fluid spraying nozzle configured to spray fluid into the process space, wherein the spin apparatus includes: a spin chuck configured to support a substrate; a rotation driving part configured to rotate the spin chuck; and a weight sensor configured to measure a weight of the substrate supported on the spin chuck.