The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 07, 2025

Filed:

Jan. 27, 2022
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Sejune Cheon, Seoul, KR;

Jeong Jin Hong, Yongin, KR;

Mikyung Shim, Seongnam, KR;

Xiaoqun Zou, Danville, CA (US);

Jinkyeong Lee, Seoul, KR;

Sang Hong Kim, Seoul, KR;

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 23/02 (2006.01);
U.S. Cl.
CPC ...
G05B 23/0254 (2013.01); G05B 23/0283 (2013.01);
Abstract

A method includes receiving first data associated with measurements taken by a sensor during a first manufacturing procedure of a manufacturing chamber. The method further includes receiving second data. The second data includes reference data associated with the first data. The method further includes providing the first and second data to a comparison model. The method further includes receiving a similarity score from the comparison model, associated with the first and second data. The method further includes performance of a corrective action in view of the similarity score.


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