The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2025
Filed:
Oct. 03, 2022
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Myung-Soo Hwang, Seoul, KR;
Kwangsub Yoon, Yongin-si, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D 1/02 (2006.01); B05B 13/02 (2006.01); B05B 15/50 (2018.01); B05B 15/55 (2018.01); B05C 11/02 (2006.01); G03F 7/16 (2006.01); H01L 21/67 (2006.01); B05B 1/24 (2006.01);
U.S. Cl.
CPC ...
G03F 7/162 (2013.01); B05B 13/0228 (2013.01); B05B 15/50 (2018.02); B05B 15/55 (2018.02); B05C 11/02 (2013.01); B05D 1/02 (2013.01); H01L 21/67017 (2013.01); H01L 21/67051 (2013.01); H01L 21/6708 (2013.01); H01L 21/6715 (2013.01); B05B 1/24 (2013.01);
Abstract
Systems and methods for semiconductor fabrication are described. A spin coater comprises a spin chuck, a nozzle, a nozzle housing, a purge gas supply, and an organic solvent supply. The nozzle housing includes a lower housing including a solvent storage groove in which the organic solvent is stored, and an upper housing on the lower housing. The upper housing includes a nozzle insert hole on the solvent storage groove and receives the nozzle, and a gas supply hole connected to one side of the nozzle insert hole.