The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2025
Filed:
Oct. 27, 2023
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Toshiki Ito, Kanagawa, JP;
Fen Wan, Austin, TX (US);
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/027 (2006.01); C09K 21/14 (2006.01); G03F 7/00 (2006.01); G03F 7/029 (2006.01); H01L 21/027 (2006.01); G02B 3/08 (2006.01); G02B 5/18 (2006.01); G02B 5/30 (2006.01); H01L 21/266 (2006.01);
U.S. Cl.
CPC ...
G03F 7/027 (2013.01); C09K 21/14 (2013.01); G03F 7/0002 (2013.01); G03F 7/0005 (2013.01); G03F 7/029 (2013.01); H01L 21/0274 (2013.01); G02B 3/08 (2013.01); G02B 5/1857 (2013.01); G02B 5/3025 (2013.01); H01L 21/266 (2013.01);
Abstract
An object is to provide a photo-curable composition having high dry etching resistance and high thermal stability. A photo-curable composition includes at least a polymerizable compound and a photopolymerization initiator, and further includes at least one of a flame retarder and a flame-retardant polymerizable compound.