The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2025
Filed:
Jun. 10, 2019
Mellanox Technologies, Ltd., Yokneam, IL;
Eth Zurich, Zurich, CH;
Aristotle University of Thessaloniki, Salonika, GR;
Claudia Hoessbacher, Zurich, CH;
Juerg Leuthold, Neerach, CH;
Elad Mentovich, Tel Aviv, IL;
Paraskevas Bakopoulos, Ilion, GR;
Dimitrios Kalavrouziotis, Papagou, GR;
Dimitrios Tsiokos, Athens, GR;
MELLANOX TECHNOLOGIES, LTD., Yokneam, IL;
ETH ZURICH, Zurich, CH;
ARISTOTLE UNIVERSITY OF THESSALONIKI, Salonika, GR;
Abstract
An optoelectronic device () includes thin film structures () disposed on a semiconductor substrate () and patterned to define components of an integrated drive circuit, which is configured to generate a drive signal. A back end of line (BEOL) stack () of alternating metal layers () and dielectric layers () is disposed over the thin film structures. The metal layers include a modulator layer (), which contains a plasmonic waveguide () and a plurality of electrodes (), which apply a modulation to surface plasmons polaritons (SPPs) propagating in the plasmonic waveguide in response to the drive signal. A plurality of interconnect layers are patterned to connect the thin film structures to the electrodes. An optical input coupler () is configured to couple light into the modulator layer, whereby the light is modulated by the modulation of the SPPs, and an optical output coupler () is configured to couple the modulated light out of the modulator layer.