The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 07, 2025

Filed:

Oct. 12, 2020
Applicant:

Shimadzu Corporation, Kyoto, JP;

Inventors:

Koki Yoshida, Kyoto, JP;

Kenji Takubo, Kyoto, JP;

Takahide Hatahori, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2022.01); G01B 9/02098 (2022.01); G01N 29/04 (2006.01); G01N 29/12 (2006.01); G01N 29/44 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02095 (2013.01); G01B 9/02098 (2013.01); G01N 29/041 (2013.01); G01N 29/043 (2013.01); G01N 29/12 (2013.01); G01N 29/4454 (2013.01); G01N 2291/014 (2013.01); G01N 2291/0234 (2013.01); G01N 2291/0289 (2013.01); G01N 2291/262 (2013.01);
Abstract

A defect inspection device () includes an excitation unit that excites an elastic wave, an irradiation unit () that applies laser lights, a measurement unit () that measures the interfered laser lights, and a control unit that acquires vibration state information which is information about a state of the elastic wave excited in an inspection target (P) for a plurality of frequencies by changing a frequency of excitation vibration caused by the excitation unit in order to excite the elastic wave in the inspection target (P), and extracts recommended frequencies (F) recommended for inspecting a defect of the inspection target (P) from among the plurality of frequencies based on the acquired vibration state information for the plurality of frequencies.


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