The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2025
Filed:
Aug. 07, 2020
Applicant:
Shin-etsu Polymer Co., Ltd., Tokyo, JP;
Inventor:
Osamu Ogawa, Saitama, JP;
Assignee:
Shin-Etsu Polymer Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); B08B 9/093 (2006.01); B65D 85/30 (2006.01);
U.S. Cl.
CPC ...
B65D 85/30 (2013.01); B08B 9/093 (2013.01); H01L 21/67386 (2013.01); B08B 2209/08 (2013.01);
Abstract
A substrate storage container includes: an opening on a front surface side; and a gas supply mechanism on a bottom surface. The gas supply mechanism has: an introduction path configured to receive a gas from a bottom surface side; a check valve disposed at a position that does not overlap with the introduction path in a horizontal plane along the bottom surface; and a flow path configured to supply the gas from the introduction path to the check valve.