The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2025
Filed:
Mar. 02, 2021
Lam Research Corporation, Fremont, CA (US);
Vitali Brand, Milpitas, CA (US);
Kamesh Venkata Gadepally, Campbell, CA (US);
Jiawei Zhao, San Jose, CA (US);
Dan Marohl, San Jose, CA (US);
Niraj Vaghela, San Jose, CA (US);
Heng Liu, Pleasanton, CA (US);
Alexander James Walker, Tigard, OR (US);
Zachary Jake Blum, San Francisco, CA (US);
Matthew Christopher Clark, Oakland, CA (US);
Jessica Jeana Kim, San Jose, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A robot system for servicing a semiconductor tool includes a cart frame. An arm support frame is fixed to the cart frame and is coupled to a robot arm. An arm frame is connected by hinges to the arm support frame at a first end and to a fixture connect interface at a second end. The fixture connect interface connects to a docking fixture of the semiconductor tool. An arm locking mechanism is attached to the arm support frame for locking the arm frame, when rotated, to an extended position or a folded position. The fixture connect interface connects the cart frame to the semiconductor tool, when the arm frame is locked in the extended position.