The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2024
Filed:
Aug. 18, 2023
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Theodorus Oosterlaken, Oudewater, NL;
Chris de Ridder, Hoogland, NL;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B65G 47/90 (2006.01); F27D 3/00 (2006.01); F27D 5/00 (2006.01); F27D 7/06 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67161 (2013.01); B65G 47/90 (2013.01); F27D 3/0084 (2013.01); F27D 5/0037 (2013.01); F27D 7/06 (2013.01); H01L 21/67017 (2013.01); H01L 21/67109 (2013.01); H01L 21/67126 (2013.01); H01L 21/67196 (2013.01); H01L 21/67742 (2013.01); H01L 21/67766 (2013.01); B65G 2201/0297 (2013.01); H01L 21/67769 (2013.01);
Abstract
The disclosure relates to substrate processing apparatus, with a first and second reactor, each reactor configured for processing a plurality of substrates; and, a substrate handling robot constructed and arranged to transfer substrates between a substrate cassette at a substrate transfer position and the first and second reactor. The apparatus is constructed and arranged with a maintenance area between the first and second reactors to allow maintenance of the reactors from the maintenance area to both the first and second reactor.