The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2024
Filed:
Dec. 21, 2015
Applicant:
Soleras Advanced Coatings Bvba, Deinze, BE;
Inventors:
Ivan Van De Putte, Waregem, BE;
Niek Dewilde, Kruishoutem, BE;
Guy Gobin, Ostend, BE;
Wilmert De Bosscher, Drongen, BE;
Assignee:
SOLERAS ADVANCED COATINGS BV, Deinze, BE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/34 (2006.01); C23C 14/54 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3476 (2013.01); C23C 14/3492 (2013.01); C23C 14/547 (2013.01); H01J 37/32899 (2013.01); H01J 37/32935 (2013.01); H01J 37/32972 (2013.01); H01J 37/3299 (2013.01); H01J 37/3411 (2013.01); H01J 37/347 (2013.01); H01J 37/3473 (2013.01);
Abstract
A cover for a configurable measuring system of a configurable sputtering system which is adapted for sputtering multilayer coatings with varying compositions and comprising a plurality of sputtering zones and having a plurality of apertures on which the cover is detachably attachable, and wherein the cover comprises a sensor system for in situ detection of a property of the multilayer coating on a substrate, wherein said at least one sensor system is attached to the cover.