The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2024
Filed:
Jul. 06, 2021
Applicant:
Prodrive Technologies Innovation Services B.v., Son en Breugel, NL;
Inventors:
Jordi Everts, Son en Breugel, NL;
Noud Slaats, Son en Breugel, NL;
Assignee:
PRODRIVE TECHNOLOGIES INNOVATION SERVICES B.V., Son en Breugel, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H02M 7/487 (2007.01);
U.S. Cl.
CPC ...
H01J 37/32146 (2013.01); H01J 37/321 (2013.01); H02M 7/487 (2013.01); H01J 2237/334 (2013.01);
Abstract
A voltage waveform generator for a plasma assisted processing apparatus includes a common node, a voltage supply circuit operable to switch between at least two voltage levels at a first switch node, a first inductor connected between the first switch node and the common node, and a control unit configured to operate the voltage supply circuit.