The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 31, 2024

Filed:

Sep. 23, 2022
Applicant:

New Power Plasma Co., Ltd., Suwon-si, KR;

Inventors:

Soon Im Wi, Seoul, KR;

Sung Joong Kim, Gwangju-si, KR;

Yoon Jae Kim, Suwon-si, KR;

Je Hyeong Yoo, Suwon-si, KR;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/321 (2013.01); H01J 37/3244 (2013.01); H01J 2237/327 (2013.01);
Abstract

Provided is a plasma reactor including a reactor body having a gas inlet at a side thereof, a gas outlet at another side thereof, and an annular loop space therein, a magnetic core provided in a shape surrounding a portion of the reactor body, and wound with a primary coil for receiving power from a power unit, so as to generate plasma by exciting a gas in the annular loop space, and a control unit for determining whether the plasma is in an off state, by comparing, to a reference value, an electrical parameter related to an output of the primary coil.


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