The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 31, 2024

Filed:

Aug. 04, 2022
Applicant:

Kioxia Corporation, Tokyo, JP;

Inventor:

Takeshi Yamane, Tsukuba Ibaraki, JP;

Assignee:

KIOXIA CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 23/083 (2018.01); G01N 23/04 (2018.01); G01N 23/18 (2018.01);
U.S. Cl.
CPC ...
G01N 23/083 (2013.01); G01N 23/04 (2013.01); G01N 23/18 (2013.01); G01N 2223/6116 (2013.01);
Abstract

An image pickup device includes a disk with an aperture through which X-rays can transmit. The device includes a vacuum suction ring having an inner peripheral ring and an outer peripheral ring having different heights, which fixes a position of the aperture with respect to a subject. The device includes a rotation stage that holds the subject and the disk with an aperture fixed by the vacuum suction ring and can rotate at a desired angle about a rotation axis along a direction perpendicular to a surface of the subject, and a one-dimensional detector in which line-shaped pixels are disposed at a predetermined pixel pitch. An imaging mirror forms an image of X-rays transmitted through the subject and the aperture on the one-dimensional detector. A control analysis unit corrects coordinates of an image intensity profile and reconstructs an image of the subject from the image intensity profile after the correction.


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