The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2024
Filed:
Feb. 23, 2021
Applicant:
Edwards Vacuum Llc, Sanborn, NY (US);
Inventor:
Marcus Hans Robert Thierley, Shakopee, MN (US);
Assignee:
Edwards Vacuum LLC, Sandborn, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
F04B 37/02 (2006.01); F04B 37/14 (2006.01); F04B 39/12 (2006.01); F04B 39/14 (2006.01);
U.S. Cl.
CPC ...
F04B 37/02 (2013.01); F04B 37/14 (2013.01); F04B 39/12 (2013.01); F04B 39/14 (2013.01);
Abstract
Pump module for a vacuum apparatus with a flange which can be connected to a vacuum apparatus in a vacuum-tight manner, at least one ion getter pump and at least one volume getter pump, NEG, where the ion getter pump is directly connected to the flange and the NEG is directly connected to the ion getter pump and where the NEG and the flange are arranged separately from each other.