The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 31, 2024

Filed:

May. 28, 2020
Applicants:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Unist (Ulsan National Institute of Science and Technology), Ulsan, KR;

Inventors:

Changseok Lee, Seoul, KR;

Hyeonsuk Shin, Ulsan, KR;

Hyeonjin Shin, Suwon-si, KR;

Seokmo Hong, Ulsan, KR;

Kyungyeol Ma, Ulsan, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/10 (2006.01); C01B 21/064 (2006.01); C23C 16/02 (2006.01); C23C 16/34 (2006.01); C23C 16/50 (2006.01); C30B 25/16 (2006.01); C30B 29/40 (2006.01); H01L 21/02 (2006.01); H01L 29/08 (2006.01); H01L 29/417 (2006.01);
U.S. Cl.
CPC ...
C23C 16/342 (2013.01); C01B 21/0641 (2013.01); C23C 16/0227 (2013.01); C23C 16/50 (2013.01); C30B 25/105 (2013.01); C30B 25/165 (2013.01); C30B 29/403 (2013.01); H01L 21/0254 (2013.01); H01L 21/02598 (2013.01); H01L 21/02609 (2013.01); H01L 21/0262 (2013.01); H01L 29/0847 (2013.01); H01L 29/41725 (2013.01);
Abstract

Disclosed herein is a method of fabricating hexagonal boron nitride in which hexagonal boron nitride is epitaxially grown. A method of fabricating hexagonal boron nitride includes placing a catalytic metal in a chamber, the catalytic metal having a hexagonal crystal structure and having a lattice mismatch of 15% or less with hexagonal boron nitride (h-BN) in a chamber; and growing hexagonal boron nitride on the catalytic metal at a temperature of 800° C. or lower while supplying a nitrogen source and a boron source into the chamber.


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