The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2024
Filed:
Jul. 26, 2019
Applicant:
Umicore Ag & Co. KG, Hanau-Wolfgang, DE;
Inventors:
Nicholas Rau, Marburg, DE;
Joerg Sundermeyer, Marburg, DE;
Andreas Rivas Nass, Bensheim, DE;
Ralf Karch, Kleinostheim, DE;
Annika Frey, Hanau, DE;
Angelino Doppiu, Seligenstadt, DE;
Eileen Woerner, Nidderau, DE;
Assignee:
UMICORE AG & CO. KG, Hanau-Wolfgang, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 15/00 (2006.01); C23C 16/18 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C07F 15/0046 (2013.01); C23C 16/18 (2013.01); C23C 16/45553 (2013.01);
Abstract
The invention relates to the synthesis and provision of a new class of volatile metal organic compounds based on bis(alkylimine)glyoxal and bis(dialkylhydrazone)glyoxal ligands in combination with cyclopentadienide and alkyl ligands for use in ALD and CVD processes.