The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2024
Filed:
Apr. 07, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Chuang-Chia Lin, San Ramon, CA (US);
Wenwei Qiao, Gilroy, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); B08B 9/46 (2006.01); B25J 11/00 (2006.01); G01J 3/02 (2006.01); G01J 3/10 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3288 (2013.01); B08B 9/46 (2013.01); B25J 11/0085 (2013.01); G01J 3/0205 (2013.01); G01J 3/10 (2013.01); B08B 2209/08 (2013.01); G01J 2003/102 (2013.01);
Abstract
Embodiments disclosed herein include a diagnostic substrate. In an embodiment, the diagnostic substrate comprises a substrate, a circuit board on the substrate, and a spectrometer coupled to the circuit board. In an embodiment, the diagnostic substrate further comprises a processor on the circuit board and communicatively coupled to the spectrometer.