The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2024
Filed:
Nov. 19, 2020
Canon Kabushiki Kaisha, Tokyo, JP;
Toshihiko Nishida, Tochigi, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides an imprint apparatus that forms an imprint material on a substrate using a mold, comprising: a light irradiator configured to irradiate the substrate with light that changes a viscosity of the imprint material without curing the imprint material; a supplier configured to supply the imprint material onto the substrate; and a controller configured to, after controlling a supply process of supplying the imprint material to a plurality of shot regions in the substrate, control a forming process of forming the imprint material using the mold and curing the imprint material for each shot region, wherein the supply process includes first processing of sequentially supplying the imprint material to the plurality of shot regions by the supplier, and second processing of irradiating, with the light, a shot region to which the imprint material has been supplied.