The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2024
Filed:
Sep. 06, 2019
Applicant:
Hitachi High-tech Corporation, Tokyo, JP;
Inventors:
Kouichi Hayakawa, Tokyo, JP;
Masami Takano, Tokyo, JP;
Kazuhiro Ueda, Tokyo, JP;
Masayoshi Ishikawa, Tokyo, JP;
Yasuhiro Yoshida, Tokyo, JP;
Assignee:
Hitachi High-Tech Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2846 (2013.01); H01L 22/12 (2013.01);
Abstract
An objective of the present invention is to provide a system which can infer the cause of a recipe error and present a correction candidate for the recipe error. A recipe information presentation system or recipe error inference system according to the present invention: causes a learner to learn a correspondence between a recipe and an error originating from the recipe; and acquires from the learner an inference result as to whether the error occurs when a new recipe is used (refer to FIG.).