The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 24, 2024

Filed:

Jul. 02, 2019
Applicant:

Hitachi High-tech Corporation, Tokyo, JP;

Inventors:

Masashi Fukaya, Tokyo, JP;

Masaaki Hirano, Tokyo, JP;

Akihiro Yasui, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 35/10 (2006.01); C12M 1/36 (2006.01); F03G 7/00 (2006.01);
U.S. Cl.
CPC ...
G01N 35/1004 (2013.01); C12M 41/48 (2013.01); F03G 7/017 (2021.08); B01D 2321/40 (2013.01); C02F 2209/36 (2013.01);
Abstract

In this invention, there are cleaning positions, andwhere cleaning tanks, anddischarge cleaning water onto the surfaces of nozzles, andand drying positions, andwhere the cleaning water adhered to the surfaces of the nozzles, andis sucked up. During movement from the cleaning positions, andfor the nozzles, andto the drying positions, andfor the nozzles, and, a control devicecauses system water to be discharged from the nozzles, andfor a first time, and during the sucking up of the cleaning water on the surfaces of the nozzles, andat the drying positions, and, the control devicecauses the system water to be discharged from the nozzles, andfor a second time. As a result, it is possible to effectively remove adhered water drops during nozzle cleaning.


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