The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2024
Filed:
Mar. 21, 2023
Applied Materials, Inc., Santa Clara, CA (US);
Sohrab Zokaei, Los Altos, CA (US);
Kiran Garikipati, Santa Clara, CA (US);
Shawn Thanhsan Le, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A system includes a mounting panel having diffusion-bonded metal plates that form a reservoir to contain a process fluid, multiple channels through which to flow the process fluid, and vias through which to flow the process fluid to and from process fluid control components attached to the mounting panel. At least a pair of the multiple channels are connected with the reservoir. A temperature sensor is attached to a top of the mounting panel, the temperature sensor in fluid communication with the reservoir through one of the vias. A set of inlet ports are attached to the mounting panel, the set of inlet ports to receive the process fluid. At least one outlet port is attached to the mounting panel, the at least one outlet port to output the process fluid from the mounting panel.