The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2024
Filed:
Aug. 14, 2020
Vermon SA, Tours, FR;
VERMON SA, Tours, FR;
Abstract
The present disclosure relates to a method of simultaneous manufacturing, from a same substrate (), at least one first CMUT transducer (I) having a first resonance frequency and at least one second CMUT transducer (II) having a second resonance frequency different from the first frequency, the method comprising the steps of: a) for each transducer (I, II), forming a cavity () on the upper surface side of the substrate, and forming a flexible membrane () suspended above the cavity (); b) forming a first layer () extending over a portion only of the upper surface of the membrane () of the first transducer (I) and which does not extend over the membrane () of the second transducer (II); and c) forming a second layer () extending over the entire upper surface of the membrane () of the first transducer and over the entire upper surface of the membrane of the second transducer.