The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2024
Filed:
Mar. 27, 2019
Applicant:
Jusung Engineering Co., Ltd., Gwangju-si, KR;
Inventors:
Won Woo Jung, Gwangju-si, KR;
Young-Rok Kim, Gwangju-si, KR;
Yoo Seong Kim, Gwangju-si, KR;
Jong Sik Kim, Gwangju-si, KR;
Chul Joo Hwang, Gwangju-si, KR;
Assignee:
JUSUNG ENGINEERING CO., LTD., , KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6875 (2013.01); C23C 16/4584 (2013.01); H01L 21/68764 (2013.01); H01L 21/68771 (2013.01);
Abstract
The present inventive concept relates to a substrate processing apparatus including a supporting part for supporting a substrate; a disk supporting a plurality of the supporting parts; a lid disposed on the disk; and a first protrusion portion coupled to the disk to protrude in an upward direction from the disk to the lid in a center region disposed inward from the supporting parts and a gap region disposed between the supporting parts.