The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 17, 2024

Filed:

Jul. 06, 2023
Applicant:

Fujifilm Corporation, Tokyo, JP;

Inventors:

Tetsuya Kamimura, Haibara-gun, JP;

Satomi Takahashi, Haibara-gun, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 3/16 (2006.01); B65D 88/06 (2006.01); B65D 88/08 (2006.01); C08F 10/06 (2006.01); C08F 14/26 (2006.01); C11D 3/20 (2006.01); C11D 3/43 (2006.01); C11D 7/22 (2006.01); C11D 7/26 (2006.01); C11D 7/50 (2006.01); G03F 7/16 (2006.01); G03F 7/32 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
G03F 7/325 (2013.01); B65D 88/06 (2013.01); B65D 88/08 (2013.01); C08F 10/06 (2013.01); C08F 14/26 (2013.01); G03F 7/16 (2013.01); H01L 21/0274 (2013.01);
Abstract

An object of the present invention is to provide a chemical liquid having excellent developability and excellent defect inhibition performance. Another object of the present invention is to provide a chemical liquid storage body, a chemical liquid filling method, and a chemical liquid storage method. The chemical liquid according to an embodiment of the present invention is a chemical liquid containing an organic solvent, a metal impurity, and an organic impurity, in which the metal impurity contains metal atoms, a total content of the metal atoms in the chemical liquid with respect to a total mass of the chemical liquid is equal to or smaller than 50 mass ppt, a total content of the organic impurity in the chemical liquid with respect to the total mass of the chemical liquid is 0.1 to 10,000 mass ppm, the organic impurity contains an alcohol impurity, and a mass ratio of a content of the alcohol impurity to the total content of the organic impurity is 0.0001 to 0.5.


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