The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 17, 2024

Filed:

Jan. 11, 2018
Applicant:

Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno, s-Gravenhage, NL;

Inventors:

Daniele Piras, Amsterdam, NL;

Paul Louis Maria Joseph van Neer, Bergschenhoek, NL;

Maarten Hubertus van Es, Voorschoten, NL;

Hamed Sadeghian Marnani, Nootdorp, NL;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 29/06 (2006.01); G01N 29/24 (2006.01); G01N 29/26 (2006.01); G01Q 60/32 (2010.01); G01S 7/527 (2006.01); G01S 15/04 (2006.01); G01S 15/89 (2006.01);
U.S. Cl.
CPC ...
G01N 29/0654 (2013.01); G01N 29/2437 (2013.01); G01N 29/26 (2013.01); G01S 7/527 (2013.01); G01S 15/04 (2013.01); G01S 15/89 (2013.01); G01Q 60/32 (2013.01);
Abstract

The present invention relates to a method of performing subsurface imaging of embedded structures in a substrate underneath a substrate surface, the method comprising the steps of applying, using a signal application actuator, an acoustic input signal to the substrate, detecting, using a vibration sensor, a return signal from the substrate and analyzing the return signal for obtaining information on the embedded structures, for enabling imaging thereof wherein the step of applying the acoustic input signal comprises applying a discontinuous signal of an acoustic signal component to the substrate, the acoustic signal component having a frequency above 1 gigahertz, such that the return signal includes a scattered fraction of the discontinuous signal scattered from the embedded structures. The invention further relates to a system.


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