The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2024
Filed:
Apr. 01, 2020
Applicant:
Meridian Innovation Pte Ltd, Singapore, SG;
Inventors:
Assignee:
Meridian Innovation Pte Ltd, Singapore, SG;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); B81B 7/00 (2006.01); G01J 5/02 (2022.01); G01J 5/12 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00246 (2013.01); G01J 5/024 (2013.01); G01J 5/12 (2013.01); B81B 7/0006 (2013.01); B81B 2201/0207 (2013.01); B81C 2203/0714 (2013.01); B81C 2203/0742 (2013.01); G01J 2005/123 (2013.01);
Abstract
A complementary metal oxide semiconductor (CMOS) device embedded with micro-electro-mechanical system (MEMS) components in a MEMS region is disclosed. The MEMS components, for example, are infrared (IR) thermosensors. The MEMS sensors are integrated on the CMOS device monolithically after CMOS processing. For example, the MEMS sensors are formed over a BEOL dielectric of a CMOS device. The device is encapsulated with a CMOS compatible IR transparent cap to hermetically seal the MEMS sensors in the MEMS region.