The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 10, 2024

Filed:

Dec. 23, 2021
Applicant:

Nanya Technology Corporation, New Taipei, TW;

Inventor:

Wei-Zhong Li, Taoyuan, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/522 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5226 (2013.01); H01L 21/76802 (2013.01); H01L 21/76829 (2013.01); H01L 21/76877 (2013.01);
Abstract

A multi-stacking carrier structure includes an etch stop layer; a first tier comprising a first passivation layer positioned on the etch stop layer, a first insulating layer positioned on the first passivation layer, and a first via positioned along the first passivation layer and the first insulating layer; a second tier positioned on the first tier and comprising a second passivation layer positioned on the first insulating layer, a second insulating layer positioned on the second passivation layer, and a second via positioned along the second passivation layer and the second insulating layer, and electrically connected to the first via; and a third tier positioned on the second tier and comprising a third passivation layer positioned on the second insulating layer, a third insulating layer positioned on the third passivation layer, and a third via positioned along the third passivation layer and the third insulating layer.


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