The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2024
Filed:
Nov. 05, 2021
Nikon Corporation, Tokyo, JP;
Hajime Mitsuishi, Yokohama, JP;
Isao Sugaya, Kawasaki, JP;
Atsushi Kamashita, Komae, JP;
Masashi Okada, Sagamihara, JP;
Minoru Fukuda, Tokyo, JP;
Hidehiro Maeda, Yokohama, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A substrate holder includes a central support portion configured to support a central portion of a substrate, and an circumferential support portion arranged on an outside of the central support portion and configured to support a circumferential portion on an outside of the central portion, and the circumferential support portion is configured to support the circumferential portion so that at least a partial region of the circumferential portion is curved toward the substrate holder with a curvature greater than that of the central portion.