The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2024
Filed:
Nov. 11, 2022
Applicant:
Von Ardenne Asset Gmbh & Co. KG, Dresden, DE;
Inventors:
Klaus Schneider, Arnsdorf, DE;
Goetz Grosser, Dresden, DE;
Thorsten Sander, Dresden, DE;
Ralf Hauswald, Bad Schandau, DE;
Assignee:
VON ARDENNE Asset GmbH & Co. KG, Dresden, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3405 (2013.01); C23C 14/3407 (2013.01); H01J 37/3464 (2013.01);
Abstract
Disclosed herein are systems, devices, and methods for a magnet system for a sputtering device. The disclosed magnet system may include a housing having a housing interior. The magnet system may also include a magnet holder disposed in the housing interior and supported by the housing in a preferably stationary manner. The magnet system may also include a dehumidifying device adjacent to or disposed in the housing interior for drying the housing interior.