The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2024
Filed:
Feb. 09, 2022
The Regents of the University of Michigan, Ann Arbor, MI (US);
Alexander Benken, Ann Arbor, MI (US);
Yogesh Gianchandani, Ann Arbor, MI (US);
THE REGENTS OF THE UNIVERSITY OF MICHIGAN, Ann Arbor, MI (US);
Abstract
A capacitive sensor device is fabricated on a dielectric substrate. The capacitive sensor device may include multiple diaphragms that differ in shape and/or size. Each of the diaphragms is paired to upper and lower electrodes in included upper and lower electrode layers, respectively. The lower layer is on the dielectric substrate and couples the lower electrodes to a lower electrode terminal in parallel. The upper electrode layer is separated from the lower electrode layer by a gap defined by a removed sacrificial layer and couples the upper electrodes in parallel to an upper electrode terminal.