The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 10, 2024

Filed:

Jun. 03, 2022
Applicant:

Robert Bosch Gmbh, Stuttgart, DE;

Inventors:

Heribert Weber, Nuertingen, DE;

Peter Schmollngruber, Aidlingen, DE;

Assignee:

ROBERT BOSCH GMBH, Stuttgart, DE;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 19/06 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); G01L 13/06 (2006.01);
U.S. Cl.
CPC ...
G01L 19/0645 (2013.01); B81B 7/0041 (2013.01); B81C 1/00293 (2013.01); G01L 13/06 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/04 (2013.01);
Abstract

A micromechanical component for a sensor device, including a substrate, at least one first counter-electrode, at least one first electrode adjustably situated on a side of the at least one first counter-electrode facing away from the substrate, and a capacitor sealing structure, which seals gas-tight an interior volume, including the at least one first counter-electrode present therein and the at least one first electrode present therein. The at least one first counter-electrode is fastened directly or indirectly to a frame structure fastened directly or indirectly to the substrate, and the frame structure framing a cavity, and the at least one first counter-electrode at least partially spanning the cavity in such a way that at least one gas is transferable between the cavity and the interior volume via at least one opening formed at and/or in the at least one first counter-electrode.


Find Patent Forward Citations

Weber, Heribert. (2024). Micromechanical component for a sensor device having a capacitor sealing structure (U.S. Patent No. 12163851). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12163851

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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