The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 10, 2024

Filed:

Sep. 21, 2020
Applicant:

Fogale Nanotech, Nîmes, FR;

Inventors:

Alain Courteville, Congenies, FR;

Gilles Fresquet, Garrigues Sainte Eulalie, FR;

Assignee:

FOGALE NANOTECH, Nîmes, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/30 (2006.01); G01B 9/02001 (2022.01); G01B 9/02015 (2022.01); G01B 9/0209 (2022.01); G01B 11/24 (2006.01); G01H 9/00 (2006.01); G03H 1/00 (2006.01); G03H 1/04 (2006.01); G03H 1/08 (2006.01);
U.S. Cl.
CPC ...
G01B 11/30 (2013.01); G01B 9/02007 (2013.01); G01B 9/0203 (2013.01); G01B 9/02032 (2013.01); G01B 9/0209 (2013.01); G01B 11/2441 (2013.01); G01H 9/00 (2013.01); G03H 1/0005 (2013.01); G03H 1/0443 (2013.01); G01B 2290/70 (2013.01); G03H 2001/0033 (2013.01); G03H 2001/0445 (2013.01); G03H 2001/0452 (2013.01); G03H 1/0866 (2013.01); G03H 2222/45 (2013.01);
Abstract

A device and method for measuring a surface of an object, including at least one light source, at least one optical sensor, and an interferometry device having a measurement arm and a reference arm, the former directing light from each light source towards the surface of the object and directing light from the surface towards each optical sensor; the measurement device, in an interferometry configuration, illuminating the reference arm and the measurement arm with each light source and directing the light from the measurement arm and the reference arm towards each optical sensor to form an interference signal; the measurement device, in an imaging configuration illuminating at least the measurement arm and directing the light from the measurement arm towards the optical sensor to form an image of the surface; the measurement device including a digital processor producing, from the interference signal and the image, information on the surface.


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