The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 10, 2024

Filed:

Jul. 31, 2020
Applicant:

Asm Ip Holding B.v., Almere, NL;

Inventors:

Carl Louis White, Gilbert, AZ (US);

Kyle Fondurulia, Phoenix, AZ (US);

Timothy James Sullivan, Gilbert, AZ (US);

Assignee:

ASM IP Holding B.V., Almere, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/448 (2006.01); C23C 16/52 (2006.01); C30B 25/16 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45561 (2013.01); C23C 16/448 (2013.01); C23C 16/455 (2013.01); C30B 25/165 (2013.01); H01L 21/67248 (2013.01); C23C 16/52 (2013.01); H01L 21/67017 (2013.01);
Abstract

A temperature control system for a chemical delivery system (e.g., comprised in a reactor system) may comprise a temperature control shell coupled to and/or enclosing at least a portion of at least one component of the chemical delivery system. A chemical delivery system may comprise a filter, an accumulator, and/or a chemical application line fluidly coupled to one another in any suitable arrangement and/or configuration. A temperature control system for such a chemical delivery system may comprise a filter temperature control shell coupled to and/or enclosing at least a portion of the filter, an accumulator temperature control shell coupled to and/or enclosing at least a portion of the accumulator, and/or an application line temperature control shell coupled to and/or enclosing at least a portion of the chemical application line.


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