The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2024
Filed:
Jul. 25, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Sebastian Gunther Zang, Grossostheim, DE;
Jürgen Henrich, Limeshain, DE;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03C 17/28 (2006.01); C03C 17/00 (2006.01); C23C 14/04 (2006.01);
U.S. Cl.
CPC ...
C03C 17/28 (2013.01); C03C 17/001 (2013.01); C23C 14/042 (2013.01);
Abstract
A substrate processing system for processing of a plurality of substrates is described. The system includes a first deposition module being a first in-line module and having a first plurality of vacuum deposition sources; a second deposition module being a second in-line module and having a second plurality of vacuum deposition sources; and a glass handling module between the first deposition module and the second deposition module.