The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2024
Filed:
Dec. 11, 2020
Lam Research Corporation, Fremont, CA (US);
Robert McKinney, Fremont, CA (US);
Sushanth Kondi, Bangalore, IN;
Mahendra Byrapura Manjunath, Bangalore, IN;
Gary B. Lind, Penn Valley, CA (US);
Vinayakaraddy Gulabal, Yadgir, IN;
Andrew Paul Eib, San Jose, CA (US);
Eddie Ze Thean Ooi, Singapore, SG;
Vishnu Sai Yalamarty, Singapore, SG;
Lam Research Corporation, Fremont, CA (US);
Abstract
A cleaning apparatus for a vacuum pedestal and method of cleaning a pedestal used in semiconductor device fabrication are described. The apparatus has a baseplate, a collar attached to the baseplate, a cap disposed on the collar, and a shaft that extends from the collar through the cap, collar and baseplate. A manual rotatable handle is attached to a shaft portion that extends from the cap. Motion of the handle in a downward direction is impeded by the cap. A disk is attached to a lower portion of the shaft and is separated from a bottom of the baseplate due to weighted rings, which are attached to the disk and surround the lower portion of the shaft such that a vertical float is present between the shaft and the cap. At least one abrasive pad is attached to the disk to remove build-up on the underlying pedestal surface.