The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2024
Filed:
May. 05, 2021
Samsung Display Co., Ltd., Yongin-si, KR;
Dae Soo Kim, Seoul, KR;
Sang Gab Kim, Seoul, KR;
Yun Jong Yeo, Hwaseong-si, KR;
Ju Hee Lee, Hwaseong-si, KR;
Soo Beom Jo, Incheon, KR;
Dae Won Choi, Cheonan-si, KR;
SAMSUNG DISPLAY CO., LTD., Yongin-si, KR;
Abstract
An etching device includes a chamber; a stage disposed in the chamber and on which a target substrate is loaded; a gas distribution unit disposed to face the stage in the chamber; a plurality of plasma generation modules disposed above the chamber; a gas supply unit that supplies gas into the chamber; a gas line connecting the gas supply unit and the plurality of plasma generation modules; and a plurality of gas inlet pipes each including an end connected to the plasma generation module and another end connected to the gas distribution unit.