The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2024
Filed:
Aug. 16, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Wolfgang Aderhold, Santa Clara, CA (US);
Samuel Howells, Portland, OR (US);
Amritha Rammohan, Milpitas, CA (US);
Huy Q. Nguyen, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G01J 5/00 (2022.01); G01J 5/0806 (2022.01); G01J 5/0818 (2022.01); G01J 5/80 (2022.01);
U.S. Cl.
CPC ...
H01L 21/67248 (2013.01); G01J 5/00 (2013.01); G01J 5/0806 (2013.01); G01J 5/0818 (2013.01); G01J 5/806 (2022.01);
Abstract
Embodiments disclosed herein include a method for determining a temperature error of a pyrometer. In an embodiment, the method comprises measuring a first signal with a first sensor of the pyrometer and measuring a second signal with a second sensor of the pyrometer. In an embodiment, the method further comprises determining a reflectivity of a reflector plate from the first signal and the second signal, and determining the temperature error using the reflectivity.