The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 03, 2024

Filed:

Sep. 08, 2023
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Dermot P. Cantwell, Sunnyvale, CA (US);

Taehun Kim, East Palo Alto, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 13/04 (2006.01); G05B 13/02 (2006.01);
U.S. Cl.
CPC ...
G05B 13/042 (2013.01); G05B 13/0265 (2013.01); G05B 13/048 (2013.01);
Abstract

A method includes determining, by a processing device, whether a first process recipe including a set of Pareto efficient parameters is to be selected from a set of process recipes, wherein the set of Pareto efficient parameters fail to satisfy each target property of a set of target properties for processing the component, in response to determining that a first process recipe is not to be selected from a set of process recipes for processing the component, selecting, by the processing device from the set of process recipes, a second process recipe including a set of parameters satisfying each target property of the set of target properties, and causing, by the processing device, the component to be processed by a process tool using the second process recipe.


Find Patent Forward Citations

Quick Actions:

Cantwell, Dermot. (2024). Process recipe creation and matching using feature models (U.S. Patent No. 12158735). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12158735

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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