Stacked staggered electrode foil capacitor structures in semiconductor devices for single and multi-voltage domain applications and method of fabrication

Abstract

A stacked staggered electrode capacitor in semiconductor devices and methods for fabrication. There are capacitor elements each with a cathode vertically disposed relative to an anode, an anode conductive plating on the anode and a cathode conductive plating on the anode. The anode conductive plating is in a laterally offset relationship to the cathode conductive plating. The plurality of capacitor elements are stacked onto another. One or more build-up layers are interposed between the capacitor elements. One or more anode connecting electrode segments are on a first side of the plurality of capacitor elements, and a cathode connecting electrode on an opposed second side of the plurality of capacitor elements is connected to the cathode conductive plating of each of the plurality of capacitor elements.