The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2024
Filed:
Mar. 25, 2020
Toto Ltd., Kitakyushu, JP;
Yutaka Momiyama, Kitakyushu, JP;
Hitoshi Sasaki, Kitakyushu, JP;
Toto Ltd., Fukuoka, JP;
Abstract
According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a bonding layer provided between the ceramic dielectric substrate and the base plate. At least one of the following first to sixth conditions is satisfied: First condition: An elongation percentage αis not less than 120%; Second condition: A ratio αof the elongation percentage is not less than 0.60; Third condition: A bonding strength βis not less than 0.4 MPa and not more than 10 MPa; Fourth condition: A ratio βof the bonding strength is not less than 0.6 and not more than 10; Fifth condition: An elastic modulus γis not less than 0.1 MPa and not more than 10 MPa; Sixth condition: A ratio γof the elastic modulus is not less than 0.6 and not more than 30.